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Deep Level Transient Spectroscopy (DLTS) with Boonton 7200 Capacity Meter Webinar

Posted January 31, 2011

Deep-level transient spectroscopy (DLTS) is an experimental tool for studying electrically active defects in semiconductors. DLTS allows researchers to define defect parameters and measure the concentration of those defects in space charge region of simple electronic devices, typically Schottky diodes or p-n junctions. DLTS has a higher sensitivity than almost any other semiconductor diagnostic technique available.


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